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Novel miniaturized anti-Spring MEMS Accelerometer with Enhanced Performance

Summary by Newswise
In a major leap forward for microelectromechanical systems (MEMS) technology, researchers have unveiled a novel miniaturized accelerometer that can boost sensitivity, reducing noise and bias instability while maintaining compact chip size. The innovation centers around a novel anti-spring mechanism featuring pre-shaped curved beams, which enables stiffness softening without requiring large bias forces or displacements. This design not only enhanc
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NewswiseNewswise

Novel miniaturized anti-Spring MEMS Accelerometer with Enhanced Performance

In a major leap forward for microelectromechanical systems (MEMS) technology, researchers have unveiled a novel miniaturized accelerometer that can boost sensitivity, reducing noise and bias instability while maintaining compact chip size. The innovation centers around a novel anti-spring mechanism featuring pre-shaped curved beams, which enables stiffness softening without requiring large bias forces or displacements. This design not only enhanc

·Charlottesville, United States
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Semiconductor DigestSemiconductor Digest

Novel Miniaturized Anti-Spring MEMS Accelerometer with Enhanced Performance - Semiconductor Digest

In a major leap forward for microelectromechanical systems (MEMS) technology, researchers have unveiled a novel miniaturized accelerometer that can boost sensitivity, reducing noise and bias instability while maintaining compact chip size.

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Semiconductor Digest broke the news in on Thursday, April 3, 2025.
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